| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflow device, whose maintenance frequency is decreased by easily refreshing a sampling conduit for measuring the oxygen concentration inside a furnace body. SOLUTION: An atmospheric gas inside a furnace body is taken out from the inside of a furnace body 10 through a sampling conduit 32 for measuring an oxygen concentration. A backwashing means 34 for reversely jetting a backwashing fluid into a sampling conduit 32 to clean the inside of the conduit is provided in the conduit 32. A filter 33, which removes a flux in the atmospheric gas inside a furnace body, is interposed in the sampling conduit 32. An oxygen analyzer 35, which measures the oxygen concentration in the atmospheric gas inside a furnace body, is connected to the front edge of the sampling conduit 32. In the backwashing means 34, two ports 36a, 36b of a three-way valve 36 are connected to the sampling conduit 32 that connects the filter 33 and the oxygen analyzer 35, and a backwashing fluid piping 37 for supplying a backwashing fluid is connected to a remaining one port 36c of the three-way valve 36. COPYRIGHT: (C)2006,JPO&NCIPI
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