OPTICAL ELEMENT OF QUARTZ GLASS, METHOD OF MANUFACTURING THE OPTICAL ELEMENT AND ITS USE

摘要

PROBLEM TO BE SOLVED: To reduce a variation of an anisotropic density of an optical element used for a linearly polarized UV laser beam radiation.

SOLUTION: The optical element especially suitable for a linearly polarized UV laser beam radiation is provided starting from an optical element of a quartz glass, which comprises a glass structure substantially having no oxygen defect, an average hydrogen content of 0.1×1016-5.0×1016molecules/cm3, and an SiH content of <5×1016molecules/cm3and transmitting an ultraviolet radiation with a wavelength of 190-250 nm. The quartz glass of this invention has a content of hydroxyl group of 10-250 wt.ppm and a virtual temperature of ≥1,000°C.

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