| 摘要 |
PROBLEM TO BE SOLVED: To provide a helium circulation device and a helium circulation method capable of efficiently efficiently re-liquefying a refrigerant at a low cost. SOLUTION: This helium circulation device 20 comprises a dewar 3 storing the liquid helium of approximately 4K, the condenser 40 connected to a GM refrigerating machine 22 and re-liquefying the helium gas, a first system having a first recovery pipe L10, a cooling pipe L11, and a gas pipe L12 leading a part of the helium gas in the dewar 3 to the GM refrigerating machine 22 and returning the helium gas cooled by the GM refrigerating machine 22 to the dewar 3, a second system having a second recovery pipe L20 and a return pipe L21 for leading a part of the helium gas in the dewar 3 to the condenser 40 and returning the helium liquefied in the condenser 40 to the dewar 3, a heater 41 installed in the condenser 40, and a control unit 100 controlling the heater 41 according to the device pressure of the dewar 3. COPYRIGHT: (C)2006,JPO&NCIPI
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