| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method and a washing apparatus of a polycrystalline silicon rod which are excellent in washing effect and prevents an acidic liquid from being carried over to pure water washing after acid washing, therefore raises no risk of forming washing spot, and prevents pollution attributed to washing tools. SOLUTION: The polycrystalline silicon washing method and apparatus are characterized by washing the rod-like polycrystalline silicon forgoingly washed with an acid, with pure water while hanging the polycrystalline silicon directly on a hanger without putting in a basket, and the washing is preferably carried out by using the hanger having a plurality of arms made of a thin L-shaped plate material, putting polycrystalline silicon rods on the rims of the thin arms for hanging the rods, washing the rods with an acid and successively with pure water by swinging the rods in pure water, showering pure water on the rods after pulling out the rods, immersing the rods in pure water and carrying out ultrasonic washing, and showering pure water on the rods after pulling out the rods. COPYRIGHT: (C)2006,JPO&NCIPI
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