发明名称 LIGHT MEASURING DEVICE AND ITS METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light measuring device for decreasing polarization dependence error, and its method. SOLUTION: An incident light beam 612 from a light source (not shown) is polarized to a polarization beam 614 having a state where the polarization is substantially fixed by a linear polarizer 610. A grating 615 is placed between the linear polarizer 610 and a wavelength dependence light element 602. The grating 615 divides the polarization beam 614 into a beam 617 making an angle in a transmission beam 616. Both the beams 616, 617 passing a filter through the wavelength dependence light element 602 are respectively received by light detectors 604, 604. Signals 618, 619 from the light detectors 604, 606 are received by a signal-processing circuit 620, and the ratio of two signals is calculated so as to obtain the wavelength of light or the wavelength change. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005292140(A) 申请公布日期 2005.10.20
申请号 JP20050099720 申请日期 2005.03.30
申请人 MITSUTOYO CORP 发明人 FELDMAN MARK
分类号 G01J3/28;G01J9/00;(IPC1-7):G01J3/28 主分类号 G01J3/28
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