| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrapure water producing/supplying system contributing to reducing a cost, improving quality, forming flexibility and saving energy in manufacturing of electronic parts and members. <P>SOLUTION: The subject water treating system for a manufacturing device of the electronic parts and members possesses a plurality of ultrapure water supplying systems each supplying independent ultrapure water as ultrapure water of an optimum grade to a plurality of wet processes different in purpose in the water treating system for the manufacturing device of the electronic parts and members including a plurality of wet processes different in purpose of using ultrapure water. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
