| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal type flowmeter enabling to prevent a measuring unit from breakage when a large amount of fluid to be measured surges into the flowmeter. <P>SOLUTION: In a laminate 50 located in a flow passage space 44 formed in a body 41 of a thermal type flowmeter 1, an orifice plate 52 in which two orifices 52A with a diameter of 0.5 mm are formed is provided. Fluid to be measured surged into the thermal type flowmeter 1 runs into a sensor flow passage S after passing through the orifices 52A. If a large amount of the fluid to be measured surges into the thermal type flowmeter 1, since the orifices 52A decreases the flow rate of the fluid to be measured, thereby preventing a measuring chip 1 from breakage without fail. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
