发明名称 RADIATION-SENSITIVE COMPOSITION, MULTILAYER BODY AND METHOD FOR PRODUCING SAME, AND ELECTRONIC COMPONENT
摘要 <p>Disclosed is a very safe radiation-sensitive composition having excellent electrical characteristics and good solution stability which is able to form a coating free from unevenness. Also disclosed are a multilayer body wherein a resin film is formed on a substrate by using this radiation-sensitive composition, and a method for producing such a multilayer body. A radiation-sensitive composition containing a cyclic olefin polymer having a polar protic group, a radiation-sensitive compound, a crosslinking agent and a solvent is characterized in that the solvent contains a dialkylene glycol dialkyl ether having two different alkyl groups in one molecule. A multilayer body comprises a substrate and a resin film formed on the substrate using the above-described radiation-sensitive composition.</p>
申请公布号 WO2005098539(A1) 申请公布日期 2005.10.20
申请号 WO2005JP05094 申请日期 2005.03.22
申请人 ZEON CORPORATION;HIGASHI, HIROKAZU;TERADA, KAZUYO;KIUCHI, TAKASHI 发明人 HIGASHI, HIROKAZU;TERADA, KAZUYO;KIUCHI, TAKASHI
分类号 G03F7/004;G03F7/038;H01L21/027;(IPC1-7):G03F7/004 主分类号 G03F7/004
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