发明名称 |
RADIATION-SENSITIVE COMPOSITION, MULTILAYER BODY AND METHOD FOR PRODUCING SAME, AND ELECTRONIC COMPONENT |
摘要 |
<p>Disclosed is a very safe radiation-sensitive composition having excellent electrical characteristics and good solution stability which is able to form a coating free from unevenness. Also disclosed are a multilayer body wherein a resin film is formed on a substrate by using this radiation-sensitive composition, and a method for producing such a multilayer body. A radiation-sensitive composition containing a cyclic olefin polymer having a polar protic group, a radiation-sensitive compound, a crosslinking agent and a solvent is characterized in that the solvent contains a dialkylene glycol dialkyl ether having two different alkyl groups in one molecule. A multilayer body comprises a substrate and a resin film formed on the substrate using the above-described radiation-sensitive composition.</p> |
申请公布号 |
WO2005098539(A1) |
申请公布日期 |
2005.10.20 |
申请号 |
WO2005JP05094 |
申请日期 |
2005.03.22 |
申请人 |
ZEON CORPORATION;HIGASHI, HIROKAZU;TERADA, KAZUYO;KIUCHI, TAKASHI |
发明人 |
HIGASHI, HIROKAZU;TERADA, KAZUYO;KIUCHI, TAKASHI |
分类号 |
G03F7/004;G03F7/038;H01L21/027;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|