| 发明名称 |
Method of laser marking, laser marking apparatus and method and apparatus for detecting a mark |
| 摘要 |
A method and apparatus for laser marking is disclosed. An interference fringe is formed on a subject to be marked using a laser beam to make a marking.
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| 申请公布号 |
US2005233550(A1) |
申请公布日期 |
2005.10.20 |
| 申请号 |
US20050086209 |
申请日期 |
2005.03.23 |
| 申请人 |
FUJIHARA ATSUSHI;NAKAYAMA MICHIO |
发明人 |
FUJIHARA ATSUSHI;NAKAYAMA MICHIO |
| 分类号 |
B41J2/44;B23K26/00;B23K26/06;B23K26/067;B23K26/073;B41M5/24;G02B3/10;G02B27/00;H01L21/76;H01L23/544;(IPC1-7):H01L21/76 |
主分类号 |
B41J2/44 |
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代理人 |
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