| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal oxidation method in order to stabilize the adhesion of a metallic oxide film and an underlying layer. <P>SOLUTION: The thermal oxidation method is performed such that two or more substrates 14 are fixed to a jig 12, and supplied to a thermal oxidation furnace 10, in order to form a metallic oxide film by oxidizing the metal film on the surface of a substrate. The distance between the substrates fixed to the jig is set at least 1/4 or more of the substrate diameter. The metal film comprises one of zirconium, aluminum, and titanium. It is preferable that the transfer speed is preferably 200 mm/minute or more at the time of supplying the jig to the thermal oxidation furnace. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
