| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tracing method and an apparatus capable of tracing the history of processing for fluid. <P>SOLUTION: A history management system 1 performs tracing from a transfer image according to respective settings such as the direction of tracing, a retrieval mode and the setting of a line. Hereat, as for the direction of tracing, there are a normal sequence tracing for retrieving a material from a product and a reverse sequence tracing for retrieving a product from a material. In addition, a lot retrieval mode includes an empty mode which takes a state wherein a tank is empty as a separator and retrieves, and a cleaning mode which takes tank cleaning as a separator. The line has a characteristic that it takes time until received fluid is discharged. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
