| 摘要 |
According to an embodiment of the present invention, a material processing systeme ( 1 ) including a process tool ( 10 ) and a process performance control system ( 100 ). The process performance control system ( 100 ) includes a process performance controller ( 55 ) coupled to the process tool ( 10 ), where the process performance controller ( 55 ) includes a process performance prediction model ( 110 ), a process recipe correction filter ( 120 ), a process controller ( 130 ), and process performance model correction algorithm ( 150 ). The process performance prediction model ( 110 ) is configured to receive tool data from a plurality of sensors coupled to process tool ( 10 ) and to predict process performance data. The process recipe correction filter ( 120 ) is coupled to the process performance prediction model ( 110 ) and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control. The process controller ( 130 ) is coupled to the process recipe correction filter ( 120 ) and is configured to update a process recipe according to the process recipe correction.
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