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发明名称
Verfahren zur Herstellung eines SOI-Substrates
摘要
申请公布号
DE69826233(T2)
申请公布日期
2005.10.20
申请号
DE19986026233T
申请日期
1998.01.13
申请人
STMICROELECTRONICS S.R.L., AGRATE BRIANZA
发明人
VILLA, FLAVIO;BARLOCCHI, GABRIELE
分类号
H01L21/762;(IPC1-7):H01L21/00
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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