| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method for a color filter using an arrangement consisting of a coupling of a device to form coloring picture elements and a polishing device for polishing off projection(s) from the color filter having projections, or removing residues and/or coagulates from the photo-resist, capable of enhancing the producibility in the polishing work when a glass substrate of the current size is to be processed and enhancing both the safety and the producibility when a glass substrate with a still larger size is to be processed. <P>SOLUTION: The color filter 1 is transported horizontally while polishing liquid is supplied to the surface of the color filter by a polishing liquid supplying part 1A, and by a polishing part 1B, a rectangular polishing head 12 is touched in rotation to the color filter surface, wherein the speed in horizontal transport should be 0.1-20 m/min, and the speed of touched rotation be 5-1000 rpm. The polishing head should be in a complex structure of a rigid plate and a resilient member. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
