发明名称 Method of making power semiconductor components
摘要 The barrier or buffer layer with first conductivity (15), has a greater thickness than is electrically essential. It is introduced in this form, by diffusion into the single-crystal homogeneous wafer in the base zone (13), before introducing other structures on the wafer top. Once they have been formed, the excess is ground and/or polished off.
申请公布号 EP0969501(B1) 申请公布日期 2005.10.19
申请号 EP19990112146 申请日期 1999.06.24
申请人 SEMIKRON ELEKTRONIK GMBH & CO. KG 发明人 HERZER, REINHARD, DR. HABIL.;NETZEL, MARIO, DR.
分类号 H01L21/329;H01L21/331;H01L21/332 主分类号 H01L21/329
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