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发明名称
PROCEDE D'ELABORATION DE COUCHE MINCE COMPRENANT UNE ETAPE DE CORRECTION D'EPAISSEUR PAR OXYDATION SACRIFICIELLE, ET MACHINE ASSOCIEE
摘要
申请公布号
FR2843487(B1)
申请公布日期
2005.10.14
申请号
FR20020010209
申请日期
2002.08.12
申请人
发明人
分类号
H01L21/66;(IPC1-7):H01L21/66;H01L21/762
主分类号
H01L21/66
代理机构
代理人
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