| 摘要 |
PROBLEM TO BE SOLVED: To prevent shortage at a contact and between drawing electrode patterns generated due to remaining development of resist or remaining etching for metallic thin membrane. SOLUTION: This planar electromagnetic actuator has a flat plate shaped movable plate, a pair of torsion bars which journals the movable plate so as to be rotated freely, a driving coil formed at least one side surface of the movable plate along the periphery edge of the movable plate, and a pair of magnetostatics generating means disposed at the outer position of the movable plate in such a direction as to orthogonally cross the axial direction of the torsion bars. The driving coil has the contact for connection with an outside, the driving coil is laminated through an insulation layer except for the contact, and a gap is provided not to bring the insulation layer into contact with a driving coil side end of the contact, thus forming the planar electromagnetic actuator. COPYRIGHT: (C)2006,JPO&NCIPI
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