发明名称 Crystal base plate and pressing device
摘要 The upper block 12 contacts the bearing block 20 , and the bearing block 20 is coupled to the upper plate 21 . The upper block 12 has a protruding part 22 on the upper surface that is worked into a convex surface with a radius of R1, and the bearing block 20 has a recessed part 23 in the undersurface that is worked into a concave surface with a radius of R2 (R2>R1). As a result of such a construction being used, the pressing surface of the upper pressing plate 15 always conforms to the surface of the quartz crystal substrate 11 during pressing, so that a uniform load is applied to the quartz crystal substrate 11 . As a result, the surface of the quartz crystal can be uniformly pressed in the hot pressing method.
申请公布号 US2005225215(A1) 申请公布日期 2005.10.13
申请号 US20050523168 申请日期 2005.01.27
申请人 NATIONAL INSTITUTE OF MATERIALS SCIENCE 发明人 KURIMURA SUNAO;HARADA MASAKI
分类号 C30B29/18;B30B15/06;C30B33/00;(IPC1-7):H01L41/04;H01L41/18 主分类号 C30B29/18
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