SPATIAL LIGHT MODULATOR WITH ROBUST MIRROR SUBSTRATE CONDITION

摘要

A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer (210) overlying the substrate , and a second layer (208) between the top surface and the first layer, the second layer overlying and abbuting the first layer. The second layer has a predetermined thickness (510) selected in relation to an index of refraction of the second layer and to a wavelenght of the incident light such that the light (506) reflecting off an interface (505) between the first and second layers constructively interferes with light (504) reflected from the top surface. Preferably, the first layer also has a predetermined thickness (512) selected such that the light (508) reflecting off an interface (507) between the first layer and the substrate constructively interferes with light (504) reflected from the top surface.