Method and apparatus for measuring the mechanical response of micro-electro-mechanical systems

摘要

The present invention relates to the field measuring the mechanical response of micro-electro-mechanical systems. More specifically, the present invention pertains to a method and apparatus that allows the direct control of the load applied to a Micro-Electro-Mechanical System in order to measure the mechanical response. The system comprises a loading sub-system, a displacement measurement sub-system, and an optional observation sub-system.