| 摘要 |
A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (x<SUB>i</SUB>, y<SUB>i</SUB>) for each spot at (x,y), and a dose modification unit for modifying an exposure dose at the nearest exposed spot at (x<SUB>i</SUB>, y<SUB>i</SUB>) for each spot at (x,y).
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