发明名称 |
PROCESSING METHOD FOR ORGANIC CRYSTAL, PROCESSING DEVICE FOR ORGANIC CRYSTAL, AND OBSERVING DEVICE FOR ORGANIC CRYSTAL |
摘要 |
<p>A short-pulse laser beam (9) emitted from a short-pulse laser beam source (1) is condensed and applied onto an organic crystal (8) stored in a sample container (6) via a shutter (2), an intensity regulating element (3), an irradiation position controlling mechanism (4) and a condensing optical system (5). The sample container (6) is mounted on a stage (7), is able to move in three-dimensional directions of x-axis, y-axis and z-axis in an x-y-z orthogonal coordinates system with z-axis being in an optical axis direction, and can be turned around z-axis. The organic crystal (8) is processed by a short-pulse laser beam condensed and applied onto the surface of the organic crystal (8). Prior to the processing, nitrogen is sprayed over the sample container (6) by a low-temperature gas ejector (C), which is a cooling device, to cool the organic crystal (8) to -150° or lower. This allows us to process a work while fixing it, and can increases a processing efficiency by a short-pulse laser beam used.</p> |
申请公布号 |
WO2005095042(A1) |
申请公布日期 |
2005.10.13 |
申请号 |
WO2005JP06695 |
申请日期 |
2005.03.30 |
申请人 |
NIKON CORPORATION;ADACHI, HIROAKI;SASAKI, TAKATOMO;MORI, YUSUKE;TAKANO, KAZUFUMI;INOUE, TSUYOSHI;MATSUMURA, HIROYOSHI;KITANO, HIROSHI |
发明人 |
ADACHI, HIROAKI;KITANO, HIROSHI |
分类号 |
B23K26/03;B23K26/06;B23K26/12;C07D213/84;G01N1/28;G01N23/20;(IPC1-7):B23K26/12 |
主分类号 |
B23K26/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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