| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element in which an electrode used as an interdigital transducer is formed on a piezoelectric substrate, and which has higher power durability compared to conventional one and small insertion loss. SOLUTION: In this surface acoustic wave element, the electrode 2 is configured by forming a Ti layer 3 on the surface of the piezoelectric substrate 1, and forming a plurality of Al alloy layers on the surface of the Ti layer 3. The doping material of each of the Al layers is at least one element selected from among W, Mo, Nb, Ta, Ti, V and Cu. The plurality of alloy layers consists of high-doping concentration Al alloy layers 4 having 10-30 wt.% of a doping concentration of the doped material, and a low-doping concentration Al alloy layer 5 having lower than 10 wt.% of a doping concentration of the doped material. A lowermost Al alloy layer formed on the surface of the Ti layer 3 and an uppermost Al alloy layer forming an electrode surface are each the high-doping concentration Al alloy layer 4. COPYRIGHT: (C)2006,JPO&NCIPI
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