| 摘要 |
PROBLEM TO BE SOLVED: To provide a processor constituted so as to be prevented from contamination of a substrate by lubricating oil leaked out of a bearing supporting a transporting shaft turnably. SOLUTION: The transporting device of substrate includes a chamber and a transporting unit 11 for transporting a substrate supplied into a chamber provided in the chamber while the transporting unit is constituted of a frame 12, a plurality of transporting shafts 21 provided respectively with a plurality of transporting rollers for transporting the substrate, oilless bearings 15 for supporting turnably the transporting shafts to the frame along the transporting direction of the substrate with a given interval, and a power transfer shaft 41 provided integrally with the frame to drive the rotation of the transporting shafts. COPYRIGHT: (C)2006,JPO&NCIPI
|
