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发明名称
Trägheitspositionierer
摘要
申请公布号
DE69734132(D1)
申请公布日期
2005.10.13
申请号
DE1997634132
申请日期
1997.07.21
申请人
ATTOCUBE SYSTEMS AG
发明人
KARRAI, DR.
分类号
H01L41/09;H02N2/04;H02N2/06;(IPC1-7):H01L41/09
主分类号
H01L41/09
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代理人
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