| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which facilitates dimensional measurement for a transparent conductive film pattern having small thickness by increasing the contrast between a transparent conductive film portion and other portion, under the situation that it becomes difficult to perform measurement by conventional technologies, since the contrast at a pattern edge portion decreases as the film thickness of a transparent conductive film pattern formed on a substrate for an LCD or the like gets thinner. SOLUTION: A lighting unit is provided with a lamp and an optical filter. The lamp generates light having higher brightness in the shorter wavelength region than visible light. The optical filter cuts off visible light and longer wavelength components. The contrast between the transparent conductive film portion and other portion is thereby increased to easily realize dimensional measurement for the transparent conductive film pattern having small thickness. COPYRIGHT: (C)2006,JPO&NCIPI
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