| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that Al breaks due to the level difference of an opening on the upper face of the forming region of a photodiode since step coverage of AI is bad when AI is used as a shielding film in the photodiode for blue laser. SOLUTION: In an optical semiconductor integrated circuit device, the opening is made in an insulating layer in the photodiode light receiving region, and a high melting metal layer covers the insulating layer as the shielding film. Since the high melting metal layer has good step coverage, the high melting metal layer does not break by the level difference of the opening on the upper face of the forming region of the photodiode. Thus, the problem is solved that the shielding film breaks when AI is used as the shielding film. COPYRIGHT: (C)2006,JPO&NCIPI
|
