| 摘要 |
PROBLEM TO BE SOLVED: To make repair and exchange of an electric heater etc. possible without stopping the operation of a furnace by preventing breakage and crushing of a radiant tube and reducing the working of a brittle material. SOLUTION: The lower side surface 5b of a flange 5 in the radiant tube 4 inserted into a through-hole 3b of a fixed flange 3 arranged in the furnace body 2 in a vacuum heat-treatment furnace 1 is laid on the fitting surface 3a of the fixed flange through a closed sealing member 6. Further, a supporting table 8 for supporting a heating device 7 inserted in the inside 4a of the radiant tube 4 is fixed at the one end of the fixed flange, and a supporting part 8b for supporting the heating device from the other end side, a through-hole 8a penetrable with the heating device 7a and made smaller than the outer diameter D of the flange and an escaping part 8c having a gap 9 between the outer peripheral part 5d and the upper surface 5a of the flange are arranged in this order. The heating device can be attatched and detatched independently of the attatch and detatch of the supporting part to the fixed flange. Further, in the gap, cushion members 10, 11 are inserted and furthermore, only the lower surface of the flange is machining-finished. COPYRIGHT: (C)2006,JPO&NCIPI
|
