| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a diagnosis method that can identify the cause of a failure while continuing the operation of equipment. <P>SOLUTION: The equipment failure diagnosis method, which diagnoses target equipment comprising a moving part and a drive mechanism for reciprocating the moving part, executes an initialization action for reciprocating the moving part of the target equipment from a predetermined initial position and then returning it to the initial position, to measure the displacement of the return position of the moving part from the predetermined initial position as a backlash value of the drive mechanism, and according to a time series of such backlash values acquired by such repeated initialization actions, identifies the type of an anomaly occurring in the drive mechanism. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
