TRANSFER MEMBER HAVING CLEANING FUNCTION AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a transfer member having a cleaning function which is transferred into a substrate processing apparatus to more securely remove foreign matters adhering to the inside of the apparatus. SOLUTION: The transfer member having a cleaning function possesses a cleaning layer on at least one surface of the transfer member. The foreign matters adhering to the inside of the substrate processing apparatus are adsorbed by the cleaning layer to remove the foreign matters for cleaning. The cleaning layer has a percentage of 20% or larger with respect to the area that contacts the objective parts of the substrate processing apparatus for removing foreign matters. In particular, the transfer member having a cleaning function is constituted by pasting a cleaning sheet on at least one surface of the transfer member via an adhesive layer, wherein the cleaning sheet has the cleaning layer on one-surface side of the supporting body of the sheet and the adhesive layer on the other-surface side of the same. COPYRIGHT: (C)2006,JPO&NCIPI