| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of irradiating a sample with light, without moving the sample from the scanning probe microscope and capable of measuring a sample in a state with the enviroment in which the sample is placed is controlled, without changing the position of the sample. SOLUTION: The scanning probe microscope is equipped with a cantilever having a probe provided to the leading end thereof, a sample moving means for moving the sample, a detachable cantilever displacement detection means for detecting the displacement of the cantilever by a laser, and an exposure means for exposing the sample to light from the part above the cantilever. The cantilever displacement detecting means can be detached independetly at the exposure to the sample. COPYRIGHT: (C)2006,JPO&NCIPI |
