| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device capable of easily selecting a proper inspection condition. SOLUTION: The flaw inspection device 1 comprises an illumination means for converting the illumination light from a light source to almost parallel light flux to illuminate a specimen; an image forming means for condensing the reflected light from a specimen 101 in the parallel light flux from the illumination means; an imaging means for taking the image formed by the image forming means; the wavelength selecting means arranged in the light path between the light source and the imaging means to set the center wavelength and wavelength width of the light flux in the light path; a flaw detection part for detecting the flaw of the specimen on the basis of the image taken by the imaging means; an angle setting means for setting the incident angleθi of the illumination light of the illumination means; and an inspection condition setting part for acquiring a plurality of center wavelengths and the reflectivity data of a region having no flaw of the specimen measured at an incident angle and setting the center wavelength at the time of imaging of the image used in the detection of a flaw and the incident angle based on the reflectivity data. COPYRIGHT: (C)2006,JPO&NCIPI
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