FOCUSING METHOD AND FOCUSING DEVICE

摘要

PROBLEM TO BE SOLVED: To miniaturize a device for focusing by realizing focusing accuracy and focusing evaluation for an entire imaging surface equivalent to focusing by MTF. SOLUTION: The focusing device is equipped with a laser beam radiation part 11, a beam spot area measuring part 12, and a lens unit adjusting part 13. The radiation part 11 radiates one parallel laser beam LB1 to the center part of a lens unit 2 so as to condense it near the center of the imaging surface 1A, and also radiates a plurality of parallel laser beams LB2 to LB5 obliquely to the center part of the lens unit 2 so as to condense them near the periphery of the imaging surface 1A. The measuring part 12 measures the area of a plurality of beam spots s1 to s5 formed on the imaging surface 1A by condensing the laser beams LB1 to LB5 by the image processing of output from an imaging device 1. The lens unit adjusting part 13 is equipped with a mechanism capable of adjusting either or both of the distance and the posture of the lens unit 2 related to the imaging surface 1A. COPYRIGHT: (C)2006,JPO&NCIPI