| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source equipped with a mechanism for switching irradiation conditions capable of obtaining a stable inspection results with a high repeatability with one light source capable of switching the plurality of irradiation conditions with simple switching operation in a short time. SOLUTION: The light source for irradiating the object to be inspected with a prescribed light signal is characterized in that it includes a plurality of irradiation parts set previously with various irradiation conditions, an irradiation part moving means for moving the irradiation part on the inspection object, and a light guide member for transmitting the light from the light source to the irradiating part. COPYRIGHT: (C)2006,JPO&NCIPI
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