发明名称 |
Detachable electrostatic chuck |
摘要 |
An electrostatic chuck is capable of attachment to a pedestal in a process chamber. The chuck has an electrostatic puck comprises a ceramic body with an embedded electrode. The ceramic body has a substrate support surface with an annular periphery. The chuck also has a base plate below the electrostatic puck that is a composite of a ceramic material and a metal. The base plate has an annular flange extending beyond the periphery of the ceramic body. The base plate and electrostatic puck can be supported by a support pedestal having a housing and an annular ledge that extends outwardly from the housing to attach to the annular flange of the base plate. A heat transfer plate having an embedded heat transfer fluid channel can also be provided.
|
申请公布号 |
US2005219786(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20040816152 |
申请日期 |
2004.03.31 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BROWN KARL;ARELLANO NORA;SHERSTINSKY SEMYON;LAU ALLEN;TSAI CHENG-HSIUNG;MEHTA VINEET;SANSONI STEVE;WANG WEI W. |
分类号 |
H01H1/00;H01L21/68;H01L21/683;(IPC1-7):H01H1/00 |
主分类号 |
H01H1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|