| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in the prior art by measuring also accurately a code of a shape-measured value, by finding a shape using a code-clarified peak wavenumber to allow highly precise measurement without requiring times and labors. SOLUTION: This device/method has a pulse light source for emitting pulse light, a light splitting means for splitting the pulse light from the pulse light source, an interference fringe acquiring means for irradiating a movable measured object moved in a substantially fixed period with the one side split pulse light split by the light splitting means to make reflected light thereof serve as object light, and for making the object light interfere with a reference light to acquire an interference fringe, using the other side split pulse light as the reference light, and a code detecting means for detecting the code of the wavenumber where a power spectrum of the interference fringe gets to a peak. COPYRIGHT: (C)2006,JPO&NCIPI |
