| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a position adjusting method for an objective lens diaphragm of a scanning electron microscope, for example, that can automatically make the center position of selected one of openings of the objective lens diaphragm coincide with the center position of the objective lens. <P>SOLUTION: The objective lens diaphragm 19 converges an electron beam onto a target 20 through the objective lens 17 and has a plurality of openings. The objective lens diaphragm 19 is designed to select one of the plurality of openings having different sizes for use, and adjusts the spread angle or the current amount of the electron beam applied to the target 20. To make the center of the selected opening coincide with the center of the objective lens 17, the focusing state of the electron beam obtained by the objective lens 17 is switched among a plurality of stages, and a specific position such as ends of a knife edge or a center position of a cross mark provided on the target 20 is determined in each of the focusing states. The position of the objective lens diaphragm 19 is thus automatically adjusted in each of the focusing states to achieve coincidence of the determined specific positions. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
