| 摘要 |
PROBLEM TO BE SOLVED: To control properly the pushing load of a washing brush which acts on a substrate, and realize space saving. SOLUTION: A front surface washing brush unit 33 equipped with a front surface washing brush 43, and a rear surface washing brush unit 34 equipped with a rear surface washing brush 44, are retained in a washing tank 31 through bearings so as to be capable of advancing and retreating with respect to a substrate 3. Then a front surface first link 48 to which the front surface washing brush unit is connected, and a rear surface first link 61 connected to the rear surface washing brush unit, are extended upward through the washing tank while the weight of a surface weight 50 acts on a front surface second link 49 connected to the front surface first link. The weight of the front surface weight is canceled by the weight of the front surface washing brush unit whereby the pushing load operated on the front surface of the substrate by the front surface washing brush is controlled. The weight of the rear surface weight 64 acts on the rear surface second link 62 connected to the rear surface first link, and the weight of the rear surface weight is canceled by the weight of the rear surface washing brush unit. Consequently, the pushing load can be controlled so that the rear surface washing brush acts on the rear surface of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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