| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture a stack structure. SOLUTION: A bonding film 4 comprising Ta or the like, capable of being oxidized, is deposited on one surface 2a of a glass substrate 2. The plurality of such glass substrates 2 are prepared. The bonding film 4 of a newly prepared glass substrate 2 is brought into contact with the other surface 2b of the glass substrate 2, and anodic joining is performed by applying a voltage in such a manner that the voltage applied to the bonding film 4 of the glass substrate 2 becomes higher than that applied to the bonding film 4 of the new glass substrate 2. A microreactor 1 is manufactured by anodically joining the plurality of glass substrates 2 in this manner. At this time, an electric field directed toward the same direction is applied to any glass substrate when anodic joining is performed. COPYRIGHT: (C)2006,JPO&NCIPI
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