发明名称 Semiconductor device manufacturing method thereof
摘要 A trench is provided, which penetrates a channel layer between adjacent gate electrodes in a MOSFET, and a Schottky metal layer is provided in the trench. Accordingly, a bottom of the trench becomes a Schottky barrier diode. Thus, the Schottky barrier diode can be included in a diffusion region of the MOSFET. Consequently, miniaturization of the device and reduction in the number of components can be realized.
申请公布号 US2005218472(A1) 申请公布日期 2005.10.06
申请号 US20050090298 申请日期 2005.03.28
申请人 SANYO ELECTRIC CO., LTD 发明人 OKADA TETSUYA;FUNAKOSHI AKIHIKO
分类号 H01L21/336;H01L21/338;H01L21/8234;H01L27/04;H01L27/06;H01L27/095;H01L29/47;H01L29/78;H01L29/872;(IPC1-7):H01L27/095 主分类号 H01L21/336
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