Herstellungsverfahren von elektronischen Bauteilen und Apparat zur Herstellung von dünnen Schichten,申请号DE19986031392-传众专利搜索

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发明名称	Herstellungsverfahren von elektronischen Bauteilen und Apparat zur Herstellung von dünnen Schichten
摘要
申请公布号	DE69831392(D1)	申请公布日期	2005.10.06
申请号	DE19986031392	申请日期	1998.12.23
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.	发明人	HONDA, KAZUYOSHI;ECHIGO, NORIYASU;ODAGIRI, MASARU;SUNAGARE, NOBUKI
分类号	H01G4/33;H01G4/18;H01G4/30;H03H3/00;(IPC1-7):H01G4/30	主分类号	H01G4/33
代理机构		代理人
主权项
地址

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