| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micromechanical electrostatic resonator which easily contrives high frequency, increases a ratio of the output voltage to the input voltage, contrives the low drive voltage and saves the power consumption. <P>SOLUTION: The micromechanical electrostatic resonator 100 includes a plate-shaped vibration body 105, a pair of electrodes 107, 107 arranged oppositely to each other at both sides of the vibration body with a gap 106 from an outer circumferential portion of the vibration body, a feeding device 110 to apply the in-phase alternating-current power to the pair of electrodes, and detecting device 103, 120 to obtain the output corresponding to a change in capacitance between the vibration body and the electrodes. The planar shape of the vibration body takes a shape having a curved outline with a neck portion. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
