| 摘要 |
PROBLEM TO BE SOLVED: To provide a combustion pressure sensor capable of enhancing sensor sensitivity, and capable of reducing output dispersion. SOLUTION: In this sensor 100 having a diaphragm 10 deformed in response to pressure, a rod 20 with one end abutting to the diaphragm 10, and displaced axial-directionally in response to the deformation of the diaphragm 10, and a sensor chip 30 provided with a pressure detecting element abutting to the other end of the rod 20 to output a detection signal in response to the displacement of the rod 20, and for detecting pressure of an inside of a combustion chamber of an internal combustion engine, spherical members 21 are provided integrally with both ends of the rod 20 contacting with the diaphragm 10 and the sensor chip 30. Since the rod 20 is thereby brought into point contact with the diaphragm 10 and the sensor chip 30, the output dispersion based on working precision of a contact face and assembling precision is reduced without using applying a relatively flexible material. The sensor sensitivity is enhanced compared with that in the prior art, because the relatively flexible material is not required to be applied. COPYRIGHT: (C)2006,JPO&NCIPI
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