发明名称 |
Novel anti-reflective coatings |
摘要 |
Anti-reflective materials such as bottom anti-reflective coatings (BARC's) and sacrificial light absorbing materials (SLAM) may be made more effective at preventing coherent light or electron beam reflection from a substrate by including in the anti-reflective material an additive to alter the radiation beam path of the reflected light or electrons. The radiation beam path altering additive may be a reflective material or a refractive material. The inclusion of such a radiation beam bath altering additive may reduce line width roughness and increase critical dimension (CD) control of interconnect lines and vias.
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申请公布号 |
US2005221218(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20040815528 |
申请日期 |
2004.03.31 |
申请人 |
CLARK SHAN C;PUTNA ERNISSE S;MEAGLEY ROBERT P |
发明人 |
CLARK SHAN C.;PUTNA ERNISSE S.;MEAGLEY ROBERT P. |
分类号 |
G03C1/492;G03F7/09;G03F7/40;(IPC1-7):G03C1/492 |
主分类号 |
G03C1/492 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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