发明名称 |
ACCESS TO ONE OR MORE LEVELS OF MATERIAL STORAGE SHELVES BY AN OVERHEAD HOIST TRANSPORT VEHICLE FROM A SINGLE TRACK POSITION |
摘要 |
An automated material handling system (100) that allows an overhead hoist (102a-102b) supported by a suspended track (106a-106b) to access Work-In-Process (WIP) parts from storage locations (110a-110b) besides the track (106a-106b). |
申请公布号 |
WO2004034438(A3) |
申请公布日期 |
2005.10.06 |
申请号 |
WO2003US32200 |
申请日期 |
2003.10.09 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
TAWYER, JEFFREY, T.;DOHERTY, BRIAN, J. |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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