发明名称 ACCESS TO ONE OR MORE LEVELS OF MATERIAL STORAGE SHELVES BY AN OVERHEAD HOIST TRANSPORT VEHICLE FROM A SINGLE TRACK POSITION
摘要 An automated material handling system (100) that allows an overhead hoist (102a-102b) supported by a suspended track (106a-106b) to access Work-In-Process (WIP) parts from storage locations (110a-110b) besides the track (106a-106b).
申请公布号 WO2004034438(A3) 申请公布日期 2005.10.06
申请号 WO2003US32200 申请日期 2003.10.09
申请人 BROOKS AUTOMATION, INC. 发明人 TAWYER, JEFFREY, T.;DOHERTY, BRIAN, J.
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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