发明名称 |
Assessment and optimization for metrology instrument |
摘要 |
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.
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申请公布号 |
US2005222804(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20050524286 |
申请日期 |
2005.02.10 |
申请人 |
ARCHIE CHARLES N;BANKE JR G W |
发明人 |
ARCHIE CHARLES N.;BANKE JR G. W. |
分类号 |
G03F7/20;G06F15/00;G06F19/00;(IPC1-7):G06F15/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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