发明名称 |
Apparatus and method for inspecting a semiconductor component |
摘要 |
Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder ( 16 ) so that an illumination device ( 38, 40, 42 ) is integrated into the substrate holder ( 16 ) in such a way that transmitted-light illumination of the wafer ( 18 ) is possible.
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申请公布号 |
US2005219521(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20050076620 |
申请日期 |
2005.03.10 |
申请人 |
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH |
发明人 |
VOLLRATH WOLFGANG;KRIEG THOMAS |
分类号 |
G01N21/956;G01N21/00;G01N21/95;G01R31/26;G02B27/02;H01L21/66;H01L21/68;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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