METHOD OF SELECTIVELY APPLYING CARBON NANOTUBE CATALYST

摘要

A method of applying a carbon nanotube growing catalyst to at least one specified position on the surface of a substrate made of a conductive material, which forms a coating layer on the substrate surface, and provides a hole contacting the substrate surface in the coating layer at a position corresponding to each of the respective specified positions. Conductive material particles are applied obliquely from above the coating layer with the substrate rotated around an axis almost vertical to the substrate surface to thereby deposit conical deposit on the portion of the substrate surface in contact with the hole and form eaves-like deposition layers growing so as to close the opening of the hole. The size of the opening is measured according to the growth of the eaves-like deposit layers, and, when the size of the opening is measured to be of a specified size, the catalyst material particles are applied through the opening, thereby applying the catalyst to the tip end of the conical deposit.