发明名称 SAW DEVICE AND PRODUCTION METHOD THEREFOR
摘要 A SAW device is highly moisture-resistant, and thus, does not deteriorate in electrical properties. Plural SAW elements each having IDT electrodes mainly composed of aluminum are formed on a piezoelectric substrate. Then, the piezoelectric substrate is soaked in a solution containing phosphorous-ion, washed in water, and dried after being taken out of the solution. The piezoelectric substrate is then divided by dicing into each SAW element after the element is measured in frequency characteristics and sorted. Then, the SAW element is mounted to a package and electrically connected with a wire. Then, a lid closes an opening of the package. <IMAGE>
申请公布号 EP1353441(B1) 申请公布日期 2005.10.05
申请号 EP20020729520 申请日期 2002.01.09
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 MATSUO, SATOSHI;INOUE, TAKASHI;MURAKAMI, YOSHIKI
分类号 H01L41/22;H01L41/23;H01L41/29;H03H3/08;H03H9/02 主分类号 H01L41/22
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