发明名称 Scanning probe microscope with improved probe head mount
摘要 A mounting mechanism for the probe head of a Scanning Probe Microscope (SPM) includes two dovetail and two right and left threaded pushdown screws, for convenient mounting and clamping of the probe head. After inserting the probe head between the upper and lower dovetails of the z stage, handles of the pushdown screws are turned so that the lower portion of the upper dovetail rail clamp down the probe head. This mounting mechanism using the dovetail rails and pushdown screws ensures rigid mount and convenient use of the probe head at the same time.
申请公布号 US6951129(B2) 申请公布日期 2005.10.04
申请号 US20040755750 申请日期 2004.01.12
申请人 PSIA CORPORATION 发明人 KWON JOONHYUNG;KIM YOUNG SEOK;PARK SANG-IL
分类号 G01B21/30;G01Q10/02;G01Q10/04;G01Q20/02;G01Q30/00;G01Q60/32;G01Q60/38;G01Q70/02;G01Q70/10;H01J37/26;(IPC1-7):G01N13/16 主分类号 G01B21/30
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